| Furnace heater | GRABO-1H |
|---|---|
| Heating element | Kantal wire, Glass wool molding |
| Heating zone | 50mm×150mm |
| Heater temperature | Max. 1,000℃ |
| Quartz tube size | GRABO-1H |
| Gas(MFC) | Ar, H2, CH4, O2,..etc |
| Pump | Rotary pump |
| Option | MO source, TMP |
| Control | Manual control or PC |